The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Mar. 22, 2013
Lumentum Operations Llc, Milpitas, CA;
Abdul Jaleel K. Moidu, Nepean, CA;
Lumentum Operations LLC, Milpitas, CA (US);
Abstract
Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.