The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Oct. 01, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Kallol Bera, San Jose, CA (US);
Kim Vellore, San Jose, CA (US);
Andrew Constant, Cupertino, CA (US);
Jacob Newman, Palo Alto, CA (US);
Jeffrey Blahnik, Leander, TX (US);
Jason Schaller, Austin, TX (US);
William Weaver, Austin, TX (US);
Robert Vopat, Austin, TX (US);
Benjamin Riordon, Newburyport, MA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of multi-substrate thermal management apparatus are provided herein. In some embodiments, a multi-substrate thermal management apparatus includes a plurality of plates vertically arranged above one another; a plurality of channels extending through each of the plurality of plates; a supply manifold including a supply channel coupled to the plurality of plates at first locations; and a return manifold including a return channel coupled to the plurality of plates via a plurality of legs at second locations, wherein the supply and return channels are fluidly coupled to the plurality of channels to flow a heat transfer fluid through the plurality of plates.