The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2017

Filed:

May. 31, 2012
Applicants:

Ryo Fujii, Tokyo, JP;

Masaru Nakamura, Tokyo, JP;

Yoshio Imahori, Tokyo, JP;

Masaharu Hoshi, Hiroshima, JP;

Inventors:

Ryo Fujii, Tokyo, JP;

Masaru Nakamura, Tokyo, JP;

Yoshio Imahori, Tokyo, JP;

Masaharu Hoshi, Hiroshima, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/14 (2006.01); C23C 16/06 (2006.01); H05H 6/00 (2006.01); C23C 14/14 (2006.01);
U.S. Cl.
CPC ...
C23C 16/06 (2013.01); C23C 14/14 (2013.01); H05H 6/00 (2013.01);
Abstract

Provided are an automatic lithium target regenerating apparatus and an automatic lithium target regenerating method, which are equipped with a measurement function of a lithium film thickness of a lithium target, and may automatically regenerate the consumed lithium target by moving a vapor deposition source to the lithium target. An automatic lithium target regenerating apparatus () is allowed to automatically regenerate lithium of a lithium target. The automatic lithium target regenerating apparatus () includes a lithium vapor deposition unit () for vapor-depositing the lithium on the lithium target. The lithium vapor deposition unit () is allowed to vapor-deposit the lithium on the lithium target by moving to the lithium target side.


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