The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2017

Filed:

Jul. 28, 2014
Applicant:

Lg Innotek Co., Ltd., Seoul, KR;

Inventors:

Young Jae Lee, Seoul, KR;

Kyoung Jong Yoo, Seoul, KR;

Jun Lee, Seoul, KR;

Jin Su Kim, Seoul, KR;

Jae Wan Park, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); H01L 29/06 (2006.01); C30B 11/12 (2006.01); C30B 29/60 (2006.01); B22F 9/16 (2006.01); C04B 35/622 (2006.01); B82Y 10/00 (2011.01); B22F 1/00 (2006.01); C23C 16/01 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0005 (2013.01); B22F 1/0044 (2013.01); B22F 9/16 (2013.01); B82Y 10/00 (2013.01); C04B 35/622 (2013.01); C23C 16/01 (2013.01); C30B 11/12 (2013.01); C30B 29/60 (2013.01); H01L 29/0673 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01L 29/66469 (2013.01); H01L 29/775 (2013.01); Y10S 977/888 (2013.01); Y10S 977/89 (2013.01); Y10T 428/24802 (2015.01); Y10T 428/298 (2015.01);
Abstract

Provided is a nanowire manufacturing substrate, comprising a grid base layer on a substrate and a grid pattern formed by patterning the grid base layer, the grid pattern being disposed to produce a nanowire on a surface thereof. According to the present invention, the width and height of the nanowire can be adjusted by controlling the wet-etching process time period, and the nanowire can be manufactured at a room temperature at low cost, the nanowire can be mass-manufactured and the nanowire with regularity can be manufactured even in case of mass production.


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