The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Apr. 29, 2015
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
John J. Ellis-Monaghan, Grand Isle, VT (US);
John C. S. Hall, New Hartford, CT (US);
Marwan H. Khater, Astoria, NY (US);
Edward W. Kiewra, South Burlington, VT (US);
Steven M. Shank, Jericho, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/062 (2012.01); H01L 31/113 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14687 (2013.01); H01L 27/14643 (2013.01); H01L 27/14685 (2013.01); H01L 27/14692 (2013.01); H01L 27/14694 (2013.01);
Abstract
Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps.