The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Feb. 02, 2015
Applicant:

SK Hynix Inc., Gyeonggi-do, KR;

Inventor:

Sung-Kun Park, Gyeonggi-do, KR;

Assignee:

SK Hynix Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 27/11521 (2017.01); H01L 29/423 (2006.01); H01L 27/11519 (2017.01); H01L 27/11543 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 27/11519 (2013.01); H01L 27/11543 (2013.01); H01L 29/42324 (2013.01); H01L 29/42328 (2013.01); H01L 29/7881 (2013.01);
Abstract

A nonvolatile memory device may include: an isolation layer formed in a substrate and defining an active region; a control plug formed over the isolation layer; a floating gate formed over the substrate and including a plurality of fingers adjacent to the control plug with a gap provided therebetween; and a charge blocking layer formed on sidewalls of the floating gate so as to fill the gap. The control plug may include: a first control plug formed between the plurality of fingers and having sidewalls facing inner walls of the fingers; and a second control plug formed outside the floating gate and having sidewalls facing outer walls of the fingers.


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