The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Nov. 01, 2013
Applicant:
Nanya Technology Corp., Tao-Yuan Hsien, TW;
Inventors:
Shyam Surthi, Boise, ID (US);
Lars Heineck, Garden City, ID (US);
Assignee:
NANYA TECHNOLOGY CORP., New Taipei, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/108 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10891 (2013.01); H01L 23/5222 (2013.01); H01L 27/10885 (2013.01); H01L 2924/0002 (2013.01);
Abstract
An access device includes a plurality of first digit lines (DL) trenches extending along a first direction, buried digit lines between each DL trench, second and third trenches separating the digit lines, a filling material filling the digit line trenches comprising airgaps in each second trench, a plurality of word line (WL) trenches extending along a second direction, metal word lines deposited on the walls of the word line trenches, a filling material filling the word line trenches.