The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Mar. 03, 2015
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, Tokyo, JP;
Inventors:
Masaki Hirano, Mie, JP;
Yuichi Kuroda, Mie, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/22 (2006.01); H01L 21/673 (2006.01); G01N 1/40 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); G01N 1/2214 (2013.01); G01N 1/2226 (2013.01); G01N 1/405 (2013.01); G01N 33/0026 (2013.01); G01N 2001/2223 (2013.01);
Abstract
A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.