The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Sep. 27, 2013
Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventor:

Tae Kyung Kong, Chungcheongnam-do, KR;

Assignee:

Semes Co., Ltd., Chungcheongnam-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 21/67 (2006.01); C25D 5/02 (2006.01); C23C 18/18 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); C23C 18/1603 (2013.01); C23C 18/1608 (2013.01); C23C 18/1651 (2013.01); C23C 18/1653 (2013.01); C23C 18/1689 (2013.01); C23C 18/1879 (2013.01); C25D 5/02 (2013.01); C25D 5/022 (2013.01);
Abstract

Provided is a supporting unit. The supporting unit includes: a supporting plate including a substrate on a top surface thereof; and a heater having a predetermined pattern at a bottom surface of the supporting plate and heating the supporting plate, wherein the heater includes: a first metal plating layer applied on the bottom surface of the supporting plate along the predetermined pattern; an anti-oxidation layer of a conductive material applied on the first metal plating layer along the predetermined pattern; and a second metal plating layer of a conductive material applied on the anti-oxidation layer in a portion of the pattern.


Find Patent Forward Citations

Kong, Tae. (2017). Supporting unit, substrate treating device including the same, and method of manufacturing the supporting unit (U.S. Patent No. 9691644). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9691644

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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