The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Jun. 29, 2012
Yong Hyun Choi, Suwon-si, KR;
Kibong Kim, Paju-si, KR;
Woo Young Kim, Cheonan-si, KR;
Jeong Seon Park, Cheonan-si, KR;
Yong Hyun Choi, Suwon-si, KR;
Kibong Kim, Paju-si, KR;
Woo Young Kim, Cheonan-si, KR;
Jeong Seon Park, Cheonan-si, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
Provided are an apparatus for treating a substrate and a method for discharge a supercritical fluid, and more particularly, an apparatus for treating a substrate using a supercritical fluid and a method for discharging the supercritical fluid using the same. The apparatus for treating the substrate includes a container for providing a supercritical fluid, a vent line through which the supercritical fluid is discharged from the container, and a freezing prevention unit disposed in the vent line to prevent the supercritical fluid from being frozen.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile