The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Mar. 07, 2013
Applicants:

Kazunori Kanada, Fukuoka, JP;

Tadaharu Minato, Tokyo, JP;

Yusuke Kawase, Tokyo, JP;

Inventors:

Kazunori Kanada, Fukuoka, JP;

Tadaharu Minato, Tokyo, JP;

Yusuke Kawase, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); B23K 26/08 (2014.01); H01L 21/324 (2006.01); B23K 26/06 (2014.01); H01L 29/66 (2006.01); B23K 26/082 (2014.01); B23K 26/0622 (2014.01); B23K 26/073 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0604 (2013.01); B23K 26/0622 (2015.10); B23K 26/0732 (2013.01); B23K 26/082 (2015.10); B23K 26/0853 (2013.01); H01L 21/324 (2013.01); H01L 29/66333 (2013.01);
Abstract

A laser annealing device of the present invention includes a stage on which a heating object is placed, a first laser element which emits first continuous laser light, a first optical system which leads the first continuous laser light to the heating object to form a first application region on the heating object, a second laser element which emits second continuous laser light having a wavelength shorter than that of the first continuous laser light, a second optical system which leads the second continuous laser light to the heating object to form a second application region on the heating object, and a system controller which executes scanning with the first application region and the second application region so that each portion of the heating object is scanned with at least part of the first application region before being scanned with the second application region.


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