The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Sep. 09, 2013
Reno Technologies, Inc., Wilmington, DE (US);
Daniel T. Mudd, Reno, NV (US);
Patti J Mudd, Reno, NV (US);
Abstract
A mass flow controller (MFC) has a standard envelope with an enclosure and a corresponding base. A pressure transducer is communicatively coupled to a process gas in a proportional inlet valve without being physically coupled to the base. The space formerly occupied by the pressure transducer is available for additional component integration, or reduction of the standard envelope size. A second pressure transducer is located remotely and shared by multiple MFCs. A relief valve can quickly relieve a Ppressure of a Pvolume of process gas. A first laminar flow element (LFE) and a second LFE and in series high conductance valve configured in parallel to produce a wide-range MFC that maintains accuracy.