The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Oct. 15, 2013
Applicant:

North Carolina State University, Raleigh, NC (US);

Inventors:

Michael J. Escuti, Cary, NC (US);

Matthew N. Miskiewicz, Raleigh, NC (US);

Jihwan Kim, Raleigh, NC (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H 1/02 (2006.01); G02B 5/30 (2006.01); G02B 27/28 (2006.01); G03F 7/20 (2006.01); G02B 26/10 (2006.01); G02B 5/32 (2006.01); G03H 1/08 (2006.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G02B 5/3083 (2013.01); G02B 5/3016 (2013.01); G02B 5/32 (2013.01); G02B 26/101 (2013.01); G02B 27/286 (2013.01); G03F 7/70191 (2013.01); G03F 7/70383 (2013.01); G03F 7/70566 (2013.01); G03H 1/0248 (2013.01); G03H 1/0476 (2013.01); G03H 1/08 (2013.01); G03H 2001/0478 (2013.01); G03H 2222/31 (2013.01); G03H 2240/15 (2013.01);
Abstract

A direct-write lithography apparatus includes a polarization selector stage configured to vary a polarization orientation angle of light from a light source, a focusing element configured to focus the light from the light source into a spot at a focal plane thereof, and a scanning stage configured to scan the spot in at least two dimensions along a surface of a polarization-sensitive recording medium that is arranged proximate to the focal plane such that neighboring scans substantially overlap. The polarization selector stage and the scanning stage are configured to be operated independently of one another. Related fabrication methods of and optical elements fabricated thereby are also discussed.


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