The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Oct. 01, 2013
Creative Technology Corporation, Kawasaki-shi, Kanagawa, JP;
CREATIVE TECHNOLOGY CORPORATION, Kawasaki-Shi, JP;
Abstract
Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad () mounted on a support plate, includes: a capacitance measuring device () including an electrode pair formed of first and second electrodes () and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device () being configured to measure capacitance of the electrode pair; and a comparator circuit () configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit () with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).