The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Aug. 06, 2015
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Karl Pilch, Villach, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 25/68 (2006.01); C03C 15/00 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
C03C 15/00 (2013.01); H01L 21/02019 (2013.01); H01L 21/30604 (2013.01); H01L 21/6708 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H01L 22/12 (2013.01); H01L 22/26 (2013.01); H01J 2237/2001 (2013.01); H01L 21/30608 (2013.01);
Abstract
An etchant is supplied to a workpiece. Furthermore, the workpiece is irradiated with spatially modulated light to adjust a temperature profile of the workpiece while etchant is supplied.