The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Jan. 26, 2016
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Hitoshi Sakuma, Tokyo, JP;
Ryu Ohta, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/48 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); B41J 2/14 (2006.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0477 (2013.01); B41J 2/14233 (2013.01); G11B 5/483 (2015.09); H01L 41/0805 (2013.01); H01L 41/09 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01); H01L 41/1873 (2013.01);
Abstract
The present invention provides a piezoelectric thin film element having a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting the piezoelectric thin film or oxide particles of Pt.