Manufacturing method of solar cell

Abstract

A manufacturing method of a solar cell having diffusion layers of different conductivity types on a front surface of a semiconductor substrate and a back surface thereof, respectively, includes a step of forming a diffusion protection mask containing impurities to cover at least a partial region of the semiconductor substrate, and a diffusion step of performing a diffusion step including a thermal step in a state where at least the partial region of the semiconductor substrate is covered with the diffusion protection mask containing impurities, forming a first-impurity diffusion layer in a first region covered with the diffusion protection mask, and forming a second-impurity diffusion layer having a different impurity concentration or a different conductivity type from that of the diffusion protection mask in a second region exposed from the diffusion protection mask.