Silicon carbide field effect transistor

Abstract

A silicon carbide field effect transistor includes a silicon carbide substrate, an n-type drift layer, a p-type epitaxy layer, a source region, a trench gate, at least one p-type doped region, a source, a dielectric layer and a drain. The p-type doped region is disposed at the n-type drift layer to be adjacent to one lateral side of the trench gate, and includes a first doped block and a plurality of second doped blocks arranged at an interval from the first doped block towards the silicon carbide substrate. Further, a thickness of the second doped blocks does not exceed 2 um. Accordingly, not only the issue of limitations posed by the energy of ion implantation is solved, but also an electric field at a bottom and a corner of the trench gate is effectively reduced, thereby enhancing the reliability of the silicon carbide field effect transistor.