The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9685453 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 20, 2017

Filed:

Jul. 04, 2016
Applicant:

Renesas Electronics Corporation, Koutou-ku, Tokyo, JP;

Inventor:

Fukuo Owada, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 27/11575 (2017.01); H01L 29/66 (2006.01); H01L 21/265 (2006.01); H01L 21/266 (2006.01); H01L 21/311 (2006.01); H01L 27/1157 (2017.01); H01L 27/11573 (2017.01); H01L 23/525 (2006.01); H01L 27/112 (2006.01); H01L 27/11568 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11575 (2013.01); H01L 21/265 (2013.01); H01L 21/266 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 23/5256 (2013.01); H01L 27/1157 (2013.01); H01L 27/11206 (2013.01); H01L 27/11568 (2013.01); H01L 27/11573 (2013.01); H01L 29/66833 (2013.01);
Abstract

To provide a semiconductor device having mix-loaded therein a nonvolatile memory cell and a field effect transistor at a reduced cost. A method of manufacturing a semiconductor device includes pattering a conductor film by using an additional mask that covers a gate electrode formation region of a memory formation region and exposes a main circuit formation region (field effect transistor formation region) and thereby forming a gate electrode of a nonvolatile memory cell in the memory formation region and then forming an ntype semiconductor region of the nonvolatile memory cell in a semiconductor substrate by ion implantation using the above-mentioned additional mask without changing it to another one.


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