The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2017

Filed:

Oct. 16, 2015
Applicant:

Fujitsu Semiconductor Limited, Yokohama-shi, Kanagawa, JP;

Inventors:

Kazushi Fujita, Kuwana, JP;

Taiji Ema, Inabe, JP;

Makoto Yasuda, Kuwana, JP;

Mitsuaki Hori, Kuwana, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/085 (2006.01); H01L 27/092 (2006.01); H01L 29/66 (2006.01); H01L 29/872 (2006.01); H01L 21/8238 (2006.01); H01L 29/36 (2006.01); H01L 29/78 (2006.01); H01L 29/861 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0921 (2013.01); H01L 21/823892 (2013.01); H01L 27/0928 (2013.01); H01L 29/0619 (2013.01); H01L 29/0649 (2013.01); H01L 29/36 (2013.01); H01L 29/66136 (2013.01); H01L 29/66143 (2013.01); H01L 29/78 (2013.01); H01L 29/8613 (2013.01); H01L 29/872 (2013.01); H01L 29/8725 (2013.01);
Abstract

A semiconductor device including an insulating film in a first region of a semiconductor substrate; a first impurity region and a second impurity region of a first conductivity type, each of the regions including a part located deeper than the insulating film in contact with each other, and the insulating film being sandwiched by the first and second impurity regions in planar view in the first region of the semiconductor substrate; a metal silicide film on the first impurity region and in Schottky junction with the first impurity region; a first impurity of the first impurity region having a peak of a concentration profile deeper than a bottom of the insulating film; a second impurity of the second impurity region having a concentration higher than a concentration of the first impurity in a part of the first impurity region shallower than the bottom of the insulating film.


Find Patent Forward Citations

Loading…