The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Dec. 11, 2014
Globalfoundries, Inc., Grand Cayman, KY;
Jens Kramer, Dresden, DE;
Uwe Schoene, Kamenz, DE;
GLOBALFOUNDRIES, INC., Grand Cayman, KY;
Abstract
Wafer processing apparatuses and methods of operating the same are provided herein. In an embodiment, a wafer processing apparatus includes a rotatable platen that has the capacity to support a polishing pad on a pad mounting surface of the rotatable platen. A drive assembly is coupled to the rotatable platen and has the capacity to rotate the rotatable platen. A polishing head is coupled to a head actuator. The polishing head is disposed adjacent to and over a first portion of the pad mounting surface and the polishing head is movable relative to the pad mounting surface by the head actuator. An optical sensor has a vision field including a second portion of the pad mounting surface. The first portion and the second portion of the pad mounting surface are at least partially offset. A control unit is operatively connected to the drive assembly and the head actuator.