The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2017

Filed:

Jun. 26, 2014
Applicant:

Fairchild Korea Semiconductor Ltd., Bucheon-si, KR;

Inventors:

Kyu-hyun Lee, Bucheon-si, KR;

Young-chul Kim, Gimpo-si, KR;

Kyeong-seok Park, Bucheon-si, KR;

Bong-yong Lee, Seoul, KR;

Young-chul Choi, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/02 (2006.01); H01L 21/266 (2006.01); H01L 29/66 (2006.01); H01L 29/732 (2006.01); H01L 29/36 (2006.01); H01L 29/739 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/266 (2013.01); H01L 29/0615 (2013.01); H01L 29/0834 (2013.01); H01L 29/36 (2013.01); H01L 29/66333 (2013.01); H01L 29/66348 (2013.01); H01L 29/732 (2013.01); H01L 29/7395 (2013.01); H01L 29/7397 (2013.01);
Abstract

Provided are a power device having an improved field stop layer and a method of manufacturing the same. The power device includes: a first field stop layer formed of a semiconductor substrate and of a first conductive type; a second field stop layer formed on the first field stop layer and of the first conductive type, the second field stop layer having a region with an impurity concentration higher than the first field stop layer; a drift region formed on the second field stop layer and of the first conductive type, the drift region having an impurity concentration lower than the first field stop layer; a plurality of power device cells formed on the drift region; and a collector region formed below the first field stop layer, wherein the second field stop layer includes a first region having a first impurity concentration and a second region having a second impurity concentration higher than the first impurity concentration.


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