The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2017

Filed:

Jul. 26, 2012
Applicants:

William P. King, Champaign, IL (US);

Lane W. Martin, Champaign, IL (US);

Patrick C. Fletcher, Champaign, IL (US);

Inventors:

William P. King, Champaign, IL (US);

Lane W. Martin, Champaign, IL (US);

Patrick C. Fletcher, Champaign, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 1/02 (2006.01); H01J 1/30 (2006.01); H01J 9/02 (2006.01); B82Y 35/00 (2011.01); G01Q 60/30 (2010.01);
U.S. Cl.
CPC ...
H01J 1/02 (2013.01); H01J 1/30 (2013.01); H01J 9/02 (2013.01); B82Y 35/00 (2013.01); G01Q 60/30 (2013.01); H01J 2235/06 (2013.01);
Abstract

Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology.


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