The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2017

Filed:

Dec. 10, 2009
Applicants:

Erik M. H. P. Van Dijk, Eindhoven, NL;

Bas Hulsken, Eindhoven, NL;

Cornelius A. Hezemans, Nuenen, NL;

Henricus R. M. Verberne, Eindhoven, NL;

Inventors:

Erik M. H. P. Van Dijk, Eindhoven, NL;

Bas Hulsken, Eindhoven, NL;

Cornelius A. Hezemans, Nuenen, NL;

Henricus R. M. Verberne, Eindhoven, NL;

Assignee:

Koninklijke Philips N.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/36 (2006.01); G01D 5/347 (2006.01); G02B 21/24 (2006.01);
U.S. Cl.
CPC ...
G02B 21/367 (2013.01); G01D 5/34746 (2013.01); G02B 21/245 (2013.01);
Abstract

A scanning microscope includes a stage for holding a sample, a scan mechanism, a probing system for probing a region of the sample, a position sensor, and a controller. The scan mechanism is configured to translate the stage between at least two axial positions. The probing system includes an optical element and a photosensor having a readout region, where the readout region extends in a direction which is transverse to an ideal orientation of the stage. The position sensor is configured to measure a transverse position of the stage and/or of an orientation of the stage. The controller is configured to adapt the probing system as a function of the measured transverse position and/or the measured orientation.


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