The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Aug. 19, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Motoki Takabe, Shiojiri, JP;
Takahiro Kamijo, Matsumoto, JP;
Tatsuro Torimoto, Matsumoto, JP;
Toshihiro Shimizu, Fujimi-machi, JP;
Shiro Yazaki, Chino, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2013.01); H04R 17/00 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/332 (2013.01); Y10T 29/42 (2015.01);
Abstract
A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer.