The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Oct. 23, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventor:
Jun Young Kim, Asan-si, KR;
Assignee:
Samsung Display Co., Ltd., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 21/00 (2006.01); H01L 51/56 (2006.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B05C 21/005 (2013.01); C23C 14/042 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01); Y10T 29/49826 (2015.01);
Abstract
A mask frame assembly for thin film deposition and manufacturing method thereof are disclosed. One inventive aspect includes a mask frame, a plurality of first masks and a plurality of second masks. The first and second masks are alternately formed in a first direction. Two overlapped portions of each of the first and second masks are connected to both sides of the non-overlapped portion of each of the first and second mask, respectively. In addition, one overlapped portion of each first mask and one overlapped portion of each second mask overlap each other at a connection area.