The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Nov. 26, 2008
Applicants:
Katsumi Kishino, Tokyo, JP;
Akihiko Kikuchi, Tokyo, JP;
Inventors:
Katsumi Kishino, Tokyo, JP;
Akihiko Kikuchi, Tokyo, JP;
Assignee:
SOPHIA SCHOOL CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/16 (2010.01); C23C 14/04 (2006.01); C30B 23/00 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); H01L 29/04 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 33/20 (2010.01); C30B 29/60 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 33/16 (2013.01); C23C 14/042 (2013.01); C30B 23/00 (2013.01); C30B 29/403 (2013.01); C30B 29/605 (2013.01); H01L 21/0254 (2013.01); H01L 21/0259 (2013.01); H01L 21/02389 (2013.01); H01L 21/02642 (2013.01); H01L 29/045 (2013.01); H01L 29/0657 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 33/20 (2013.01); H01L 29/66795 (2013.01); H01L 33/0075 (2013.01);
Abstract
A group-III nitride structure includes a substrateand a fine wall-shaped structuredisposed to stand on the substratein a vertical direction relative to a surface of the substrateand extending in an in-plane direction of the substrate. The fine wall-shaped structurecontains a group-III nitride semiconductor crystal, and h is larger than d assuming that the height of the fine wall-shaped structureis h and the width of the fine wall-shaped structurein a direction perpendicular to the height direction and the extending direction is d.