The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Dec. 02, 2015
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Takeyoshi Masuda, Osaka, JP;
Yu Saitoh, Osaka, JP;
Hideki Hayashi, Osaka, JP;
Toru Hiyoshi, Osaka, JP;
Keiji Wada, Osaka, JP;
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Abstract
A gate insulating film is provided on a trench. The gate insulating film has a trench insulating film and a bottom insulating film. The trench insulating film covers each of a side wall and a bottom portion. The bottom insulating film is provided on the bottom portion with a trench insulating film being interposed therebetween. The bottom insulating film has a carbon atom concentration lower than that of the trench insulating film. The gate electrode is in contact with a portion of the trench insulating film on the side wall. Accordingly, a low threshold voltage and a large breakdown voltage can be attained.