The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2017

Filed:

Dec. 16, 2015
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Ryosuke Sawabe, Yokkaichi, JP;

Shigeki Kobayashi, Kuwana, JP;

Takamasa Okawa, Yokkaichi, JP;

Kei Sakamoto, Nagoya, JP;

Assignee:

KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 27/11582 (2017.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 27/11556 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/02532 (2013.01); H01L 21/76805 (2013.01); H01L 21/76831 (2013.01); H01L 21/76846 (2013.01); H01L 21/76877 (2013.01); H01L 27/11556 (2013.01);
Abstract

A semiconductor memory device according to an embodiment includes a memory cell array which has: a first conductive layer which is arranged in a first direction on a first semiconductor layer; a second conductive layer which is arranged in the first direction above the first conductive layer; a columnar second semiconductor layer which extends in the first direction; and a contact unit which electrically connects the first semiconductor layer and the second conductive layer. The contact unit has a first film which contains silicide as a first metal, and is in contact with the first semiconductor layer; and a second film which contains the first metal, is in contact with the first film, and is in contact with the first semiconductor layer with the first film interposed therebetween.


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