The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Mar. 15, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Kiran Lall Shrestha, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of controlling polishing of a substrate is described. A controller stores a library having a plurality of reference spectra. The controller polishes a substrate and measures a sequence of spectra of light from the substrate during polishing. For each measured spectrum of the sequence of spectra, the controller finds a best matching reference spectrum from the plurality of reference spectra and generates a sequence of best matching reference spectra. The controller uses a cell counting technique for finding the best matching reference spectrum. The controller determines at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra.