The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Jun. 29, 2012
Eunsun Jung, Suwon-si, KR;
Woo Young Kim, Cheonan-si, KR;
Chan Young Heo, Cheonan-si, KR;
Jeong Seon Park, Cheonan-si, KR;
Eunsun Jung, Suwon-si, KR;
Woo Young Kim, Cheonan-si, KR;
Chan Young Heo, Cheonan-si, KR;
Jeong Seon Park, Cheonan-si, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
Provided are an apparatus and method for treating a substrate, and more particularly, to an apparatus and method for treating a substrate using a supercritical fluid. The apparatus for treating a substrate includes a process chamber in which an organic solvent remaining on a substrate is dissolved using a fluid provided as a supercritical fluid to dry the substrate and a recycling unit in which the organic solvent is separated from the fluid discharged from the process chamber to recycle the fluid.