The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2017

Filed:

Feb. 13, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Yasushi Matsuno, Matsumoto, JP;

Akira Sano, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); G02B 26/00 (2006.01); G01N 21/65 (2006.01); G01J 3/28 (2006.01); G01J 3/42 (2006.01); G01J 3/44 (2006.01); G01J 3/50 (2006.01); G01J 3/51 (2006.01); G01J 3/12 (2006.01);
U.S. Cl.
CPC ...
G02B 5/284 (2013.01); G01J 3/2823 (2013.01); G01J 3/42 (2013.01); G01J 3/44 (2013.01); G01J 3/50 (2013.01); G01J 3/51 (2013.01); G01N 21/65 (2013.01); G02B 26/001 (2013.01); G01J 2003/1234 (2013.01); G01J 2003/2826 (2013.01); Y10T 29/49904 (2015.01);
Abstract

An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided.


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