The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Dec. 22, 2015
Applicant:
Magnolia Optical Technologies, Inc., Woburn, MA (US);
Inventors:
Elwood J. Egerton, Hot Springs, SD (US);
Ashok K. Sood, Brookline, MA (US);
Assignee:
Magnolia Optical Technologies, Inc., Woburn, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01J 5/24 (2006.01); H01L 31/09 (2006.01); H01L 31/028 (2006.01); G01J 5/08 (2006.01);
U.S. Cl.
CPC ...
G01J 5/24 (2013.01); G01J 5/0809 (2013.01); H01L 31/028 (2013.01); H01L 31/095 (2013.01);
Abstract
The present disclosure relates to microbolometer structures having top layers of amorphous silicon or vanadium oxide. In some examples, combinations of carbon nanotubes, nanoparticles, and/or thin films can be deposited atop the existing top layer of amorphous silicon or top layer of vanadium oxide of a microbolometer structure. Such configurations can increase the sensitivity of the microbolometers to less than 4 mK, less than 2 mK, and in some examples less than 1 mK.