The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
May. 22, 2015
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventor:
Yuji Tanaka, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 17/42 (2006.01); H01L 21/00 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C03C 17/42 (2013.01); C23C 14/086 (2013.01); H01L 21/00 (2013.01); C03C 2218/328 (2013.01); Y10T 428/31678 (2015.04);
Abstract
A supported resin substrate comprises a supporting substrate, a release layer arranged on the supporting substrate and containing a metal or a metal oxide, and a resin substrate arranged on the release layer, the resin substrate including a front surface region opposite the release layer and a rear surface region in contact with the release layer. The resin substrate consists essentially of a resin material containing elemental fluorine. The ratio of the compositional proportion of fluorine in the rear surface region of the resin substrate to that in the front surface region of the resin substrate is 0.45 or less.