The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Jul. 28, 2014
Applicant:
Central Glass Company, Limited, Ube, Yamaguchi, JP;
Inventors:
Akiou Kikuchi, Ube, JP;
Masanori Watari, Ube, JP;
Assignee:
CENTRAL GLASS COMPANY, LIMITED, Ube, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 7/24 (2006.01); B01J 19/24 (2006.01);
U.S. Cl.
CPC ...
C01B 7/24 (2013.01); B01J 19/2415 (2013.01); B01J 2219/24 (2013.01);
Abstract
An IF-derived iodine fluoride compound recovery method includes putting gas containing IFinto contact with a material to be fluorinated, thereby converting the IFinto IF; and cooling gas containing the IF, thereby trapping the IFas an IF-derived iodine fluoride compound. The recovered IFmay be reacted with fluorine to generate IF, which may be reused for a semiconductor production process.