The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2017

Filed:

Apr. 27, 2016
Applicant:

Memsic Semiconductor (Wuxi) Co., Ltd., Wuxi, Jiangsu, CN;

Inventors:

Yang Zhao, Andover, MA (US);

Piu Francis Man, Andover, MA (US);

Leyue Jiang, Wuxi, CN;

Haidong Liu, Wuxi, CN;

Bin Li, Andover, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); B81C 1/00 (2006.01); H01L 21/78 (2006.01); H01L 21/683 (2006.01); H01L 23/31 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 1/00896 (2013.01); B81C 99/004 (2013.01); H01L 21/6836 (2013.01); H01L 21/78 (2013.01); H01L 22/20 (2013.01); H01L 22/32 (2013.01); H01L 23/3114 (2013.01); H01L 2221/68327 (2013.01);
Abstract

The present disclosure discloses a method for wafer-level chip scale packaged wafer testing. The method comprises: dicing a wafer-level chip scale packaged wafer into a plurality of wafer strips each comprising a plurality of un-diced chip scale packaged devices; fixing the wafer strips onto a plurality of corresponding strip carriers respectively; testing the chip scale packaged devices of the wafer strips fixed onto the strip carriers by a testing equipment; and dicing the tested wafer strips into a plurality of individual chip scale packaged devices. Since the proposed method does not involve loading a multitude of diced chips into sockets one by one, but that a limited number of wafer strips are loaded onto corresponding strip carriers, flow jam is avoided.


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