The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Dec. 02, 2015
Mitsubishi Electric Corporation, Tokyo, JP;
Kimitoshi Sato, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
In a semiconductor pressure sensor, a fixed electrode is formed as the same layer as a diffusion layer formed to extend from a surface of a semiconductor substrate to inside of the semiconductor substrate. A void is formed by removing a sacrifice film, which is a region constituted of the same film as a floating gate electrode. A movable electrode includes an anchor portion which supports the movable electrode via the void relative to the fixed electrode and in which the sacrifice film is at least partially opened. The anchor portion has a first anchor provided to divide the movable electrode into a plurality of movable electrode units when viewed in a plan view such that one pair of adjacent movable electrode units of the plurality of movable electrode units divided share the same first anchor.