The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
May. 28, 2015
Berliner Glas Kgaa Herbert Kubatz Gmbh & Co., Berlin, DE;
Oliver Baldus, Berlin, DE;
Berliner Glas KGaA Herbert Kubatz GmbH & Co., Berlin, DE;
Abstract
A holding apparatus () designed to electrostatically hold a component (), e.g., a silicon wafer, includes a base body () produced from at least one plate (), a plurality of projecting burls () arranged on an upper side () of the base body () and form a support for component (), and an electrode device () having a plurality of electrodes () arranged on the upper side () in gaps between burls (), wherein the electrode device () comprises a silicon carrier disk () having a plurality of holes (), and the carrier disk () is arranged on the upper side () in such a manner that the burls () project through the holes () and are spaced apart from the carrier disk (), and wherein the electrodes () are arranged on disk portions between the holes (). A method for producing the holding apparatus () is also described.