The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2017

Filed:

Aug. 20, 2013
Applicant:

Korea Research Institute of Standards and Science, Daejeon, KR;

Inventors:

Chang Joon Park, Daejeon, KR;

Jong Rok Ahn, Daejeon, KR;

Cheolsu Han, Suwon-si, KR;

Sang Jung Ahn, Daejeon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/14 (2006.01); H01J 49/06 (2006.01); H01J 49/16 (2006.01);
U.S. Cl.
CPC ...
H01J 49/147 (2013.01); H01J 49/067 (2013.01); H01J 49/16 (2013.01);
Abstract

According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.


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