The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
May. 06, 2015
Globalfoundries Inc., Grand Cayman, KY;
Robert G. Carlson, Fairfax, VT (US);
Bradley M. Mahan, Burlington, VT (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
A method and apparatus for determining the presence of foreign material on a substrate chuck. The method includes: placing a bottom surface of a substrate on a top surface of the substrate chuck; applying a lateral force in a direction parallel to a top surface of the substrate chuck to the substrate; when the substrate moves partially off or moves completely off the substrate chuck in response to the applying the lateral force then a defect is present between the top surface of the substrate chuck and the bottom surface of the substrate; or when the substrate remains completely on the substrate chuck in response to the applying the lateral force then a defect is not present between the top surface of the substrate chuck and the bottom surface of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile