The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Jun. 24, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Masafumi Mizuguchi, Yokohama, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/10 (2006.01); G01J 5/00 (2006.01); G01K 11/12 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0003 (2013.01); G01J 5/10 (2013.01); G01K 11/12 (2013.01);
Abstract
There is provided a temperature measurement method for measuring a temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The method includes: detecting ultraviolet light transmitted through the ultraviolet light transmittance member using a spectroscopic measurement unit, and obtaining an absorption edge wavelength of the ultraviolet light transmittance member; and deriving a temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.