The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Mar. 23, 2016
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Alfons Dehe, Reutlingen, DE;
Roland Helm, Munich, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81B 7/04 (2006.01); G01L 1/14 (2006.01); G01L 9/00 (2006.01); G01L 13/02 (2006.01); H04R 23/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/04 (2013.01); B81B 7/0041 (2013.01); G01L 1/14 (2013.01); G01L 9/0041 (2013.01); G01L 9/0042 (2013.01); G01L 9/0073 (2013.01); G01L 13/025 (2013.01); H04R 19/005 (2013.01); H04R 23/00 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); G01L 9/0072 (2013.01); H04R 2201/003 (2013.01);
Abstract
In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.