The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Feb. 25, 2015
Applicants:
Tae Sik OH, Cheonam-si, KR;
Ho Seob Kim, Incheon, KR;
Dae Wook Kim, Seongnam-si, KR;
Inventors:
Assignee:
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SUNMOON UNIVERSITY, Asan-si, Chungcheongnam-Do, KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/073 (2006.01); H01J 37/26 (2006.01); H01J 9/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1477 (2013.01); H01J 9/02 (2013.01); H01J 37/073 (2013.01); H01J 37/26 (2013.01); H01J 2237/04924 (2013.01); H01J 2237/1516 (2013.01);
Abstract
Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a deflection voltage is applied, and floating electrodes to which the deflection voltage is not applied. The deflector is structurally stable and has a simple driving system. The deflector has good performance and characteristics.