The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2017

Filed:

Mar. 13, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Ryo Nawata, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G05D 19/02 (2006.01); G05B 15/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G05D 19/02 (2013.01); G03F 7/709 (2013.01); G05B 15/02 (2013.01);
Abstract

The present invention provides a vibration reduction apparatus which reduces a vibration of a target object supported on a base, comprising a first object supported by a first elastic member on the base, a second object supported by a second elastic member on the first object, a detection unit including a sensor having a first electrode provided on the first object and a second electrode provided on the second object, and a processor configured to obtain a distance between the first electrode and the second electrode using the sensor, a first driving unit configured to drive the first object, a first control unit configured to control the distance between the first electrode and the second electrode constant based on a detection result, wherein the second electrode and the processor are electrically connected to each other via the second elastic member.


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