The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Jun. 04, 2015
Albert-ludwigs-universitat Freiburg, Freiburg, DE;
Albert-Ludwigs-Universitat Freiburg, Freiburg, DE;
Abstract
A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit.