The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2017

Filed:

Nov. 28, 2012
Applicant:

Seagate Technology Llc, Cupertino, CA (US);

Inventors:

Wei Tian, Eden Prairie, MN (US);

Declan Macken, Prior Lake, MN (US);

Huaqing Yin, Eden Prairie, MN (US);

Venkateswara Rao Inturi, Shakopee, MN (US);

Eric Walter Singleton, Maple Plain, MN (US);

Assignee:

SEAGATE TECHNOLOGY LLC, Cupertino, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 7/22 (2006.01); G01K 7/16 (2006.01); C23C 14/06 (2006.01); H01C 7/00 (2006.01); H01C 7/02 (2006.01); G11B 5/60 (2006.01); H01C 7/06 (2006.01);
U.S. Cl.
CPC ...
G01K 7/16 (2013.01); C23C 14/06 (2013.01); G11B 5/607 (2013.01); H01C 7/006 (2013.01); H01C 7/008 (2013.01); H01C 7/021 (2013.01); H01C 7/06 (2013.01);
Abstract

An apparatus comprises a head transducer and a resistive temperature sensor provided on the head transducer. The resistive temperature sensor comprises a first layer comprising a conductive material and having a temperature coefficient of resistance (TCR) and a second layer comprising at least one of a specular layer and a seed layer. A method is disclosed to fabricate such sensor with a laminated thin film structure to achieve a large TCR. The thicknesses of various layers in the laminated thin film are in the range of few to a few tens of nanometers. The combinations of the deliberately optimized multilayer thin film structures and the fabrication of such films at the elevated temperatures are disclosed to obtain the large TCR.


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