The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2017

Filed:

Sep. 14, 2015
Applicant:

Hanking Electronics, Ltd., Canton, OH (US);

Inventor:

Alessandro Rocchi, Rosignano Solvay, IT;

Assignee:

Hanking Electronics, Ltd., Solon, OH (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); G01C 19/5762 (2012.01); G01C 19/574 (2012.01); G01P 15/097 (2006.01); G01P 15/14 (2013.01); G01P 15/18 (2013.01); G01C 19/5755 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01); G01C 19/5747 (2013.01); G01C 19/5755 (2013.01); G01C 19/5762 (2013.01); G01P 15/097 (2013.01); G01P 15/14 (2013.01); G01P 15/18 (2013.01);
Abstract

Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.


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