The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Jan. 20, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Somesh Khandelwal, Sunnyvale, CA (US);
Garry K. Kwong, San Jose, CA (US);
Kevin Griffin, Livermore, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/54 (2006.01); H01L 21/67 (2006.01); C23C 16/455 (2006.01); G01D 5/34 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/455 (2013.01); G01B 11/14 (2013.01); G01D 5/34 (2013.01); H01L 21/67259 (2013.01);
Abstract
Apparatus and methods for measuring the proximity between two components using a hardstop, an actuator and an emitter/detector passing light through a passage in the actuator are disclosed. The passage provides attenuation to the light which changes as the gap between the components changes allowing the measurement and control of the gap. Methods of determining the topology of the components using the apparatus are also described.