The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2017

Filed:

Jul. 25, 2014
Applicant:

President and Fellows of Harvard College, Cambridge, MA (US);

Inventor:

Roy Gerald Gordon, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/06 (2006.01); C07F 7/28 (2006.01); C07F 11/00 (2006.01); C07F 13/00 (2006.01); C07D 207/46 (2006.01); C07D 211/92 (2006.01); C07F 15/02 (2006.01); C07F 15/04 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C07F 15/065 (2013.01); C07D 207/46 (2013.01); C07D 211/92 (2013.01); C07F 7/28 (2013.01); C07F 11/005 (2013.01); C07F 13/005 (2013.01); C07F 15/025 (2013.01); C07F 15/045 (2013.01); H01L 21/7685 (2013.01);
Abstract

Compounds, and oligomers of the compounds, are synthesized with cyclic amine ligands attached to a metal atom. These compounds are useful for the synthesis of materials containing metals. Examples include pure metals, metal alloys, metal oxides, metal nitrides, metal phosphides, metal sulfides, metal selenides, metal tellurides, metal borides, metal carbides, metal silicides and metal germanides. Techniques for materials synthesis include vapor deposition (chemical vapor deposition and atomic layer deposition), liquid solution methods (sol-gel and precipitation) and solid-state pyrolysis. Suitable applications include electrical interconnects in microelectronics and magnetoresistant layers in magnetic information storage devices. The films have very uniform thickness and high step coverage in narrow holes.


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