The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2017

Filed:

Dec. 27, 2013
Applicants:

Tosoh Corporation, Shunan-shi, JP;

Sagami Chemical Research Institute, Ayase-shi, JP;

Inventors:

Sachio Asano, Kanagawa, JP;

Tomoyuki Kinoshita, Kanagawa, JP;

Yasushi Hara, Kanagawa, JP;

Daiji Hara, Kanagawa, JP;

Ryoji Tanaka, Kanagawa, JP;

Ken-ichi Tada, Kanagawa, JP;

Assignees:

TOSOH CORPORATION, Shunan-shi, JP;

Sagami Chemical Research Institute, Ayase-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/02 (2006.01); H01B 1/12 (2006.01); C07F 9/00 (2006.01); H01L 21/02 (2006.01); C07C 29/68 (2006.01); C07C 31/28 (2006.01); C07C 33/26 (2006.01);
U.S. Cl.
CPC ...
C07F 9/005 (2013.01); C07C 29/68 (2013.01); C07C 31/28 (2013.01); C07C 33/26 (2013.01); C07F 9/00 (2013.01); H01L 21/02118 (2013.01); H01L 21/02175 (2013.01); H01L 21/02183 (2013.01); H01L 21/02194 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01);
Abstract

A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film-forming material solution containing the compound and an organic solvent, a Group 5 metal oxide film can be manufactured using the film-forming material solution:M(μ-O)(μ-O)(μ-O)(μ-OR)(OR)(ROH)XY  (A)(wherein M represents a niobium atom, etc.; Rrepresents an alkyl group; X represents an alkylenedioxy group; Y represents a carboxy group, etc.; α represents an integer of 3 to 10; β represents 0 or 1; γ represents an integer of 0 to 8; δ represents an integer of 2 to 9; ∈ represents an integer of 0 to 6; ζ represents an integer of 6 to 16; η represents an integer of 0 to 4; θ represents an integer of 0 to 2; and ι represents an integer of 0 to 6).


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